1.5–5.0 kW — SDS 5000/6000 Series Microwave Plasma CVD Systems
This series of advanced diamond CVD systems provides many important features and advantages:
- Low- to high-power density plasma for accelerated diamond CVD growth rates
- Flexible configurations for demanding polydiamond and single crystal processes
- Stainless, cold-wall chamber
- Heated and/or cooled stage
- Multiple ports for plasma viewing and in-situ diagnostics, load-lock capable
- Range of models available for recipe-driven computer control and manual operation