SDS 6K 6 kW Microwave Plasma CVD System
Newest system for gem, tool and poly diamond production
- Excellent process stability and repeatability
- Operable in low- to high-power density plasma for accelerated growth rates
- Unique temperature control capabilities at high power densities
- Wide pressure operating range: 10-200 Torr
- Clamshell lid for easy-access substrate placement and chamber cleaning
- Recipe-driven automatic, semiautomatic and manual control